Excited for this week!
EUV Tech R&D is at the EUVL Workshop at LBNL this week - I am giving a talk on “Applications of EUV Metrology Tools” today, Stuart Sherwin gives “EUV Tech ENK Tool: Actinic metrology for n/k, phase and 3D geometry” on Thursday, and Luke Long gives “Effects of Multilayer Roughness in High NA EUV Lithography” also on Thursday.